Glossary - Development and Prototyping Experiments
B
- Batch processing
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Category: Equipment-related
This is a method of processing multiple wafers, glass substrates, or other products together in a cassette or on a rack. Although the time required for one treatment is long and this method is not suitable for mass production, it is possible to change the treatment conditions each time. To ensure uniformity in batches, it is necessary to use a technology that maintains uniform gas and temperature distribution within the heating chamber.
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C
- Continuous processing
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Category: Equipment-related
This is heat treatment performed while workpieces on a mesh belt or other transport mechanism are transported through the heating zone. Because all workpieces are treated under the same conditions, it is suitable for producing a single product in large quantities.
D
- Debinding
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Category: Equipment-related
A binder is added to some electronic components, ceramic parts, and other products to give them plasticity and shape retention during the manufacturing process. Debinding is a process that removes this binder.
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- Degreasing
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Category: Equipment-related
This removes oil adhering to the surface and other parts during the product manufacturing process.
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E
- Exhaust gas treatment equipment
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Category: Equipment-related
This equipment combusts and decomposes organic substances contained in exhaust gases produced during heat treatment in order to eliminate odors and clean the exhaust gases. Exhaust gases which contain organic substances produced during debinding, degreasing, or other processes have strong irritating odors and are also flammable. If they are discharged untreated, they will adversely affect the work environment and the environment surrounding the plant, and may result in the risk of explosion or fire.
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F
- Firing
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Category: Equipment-related
This is a heat treatment that is performed primarily to create stable component compounds and ensure a certain shape and strength by heating the workpiece at high temperature.
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G
- Gas seal adapter
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Category: Equipment-related
This is installed onto both ends of the furnace core tube in order to maintain a seal inside the tube in a tube furnace.
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I
- Igniter
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Category: Equipment-related
This is a safety device that is installed when performing heat treatment in a hydrogen atmosphere. It is able to combust the hydrogen that is contained in the exhaust gases.
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- Inert gas
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Category: Equipment-related
A gas such as nitrogen or argon is injected to reduce the oxygen concentration in the heating zone/chamber.
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- Injected gas
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Category: Equipment-related
This is a gas that is injected into the heating chamber, e.g. nitrogen, argon, hydrogen, and ammonia. In order to maintain the atmosphere of the injected gas, it is necessary to maintain the airtightness of the heating chamber.
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M
- Muffle, Furnace core tube
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Category: Equipment-related
These are installed in a furnace to maintain the airtightness of the heating chamber. The material is inconel, ceramic and quartz.
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N
- Non-oxidizing atmosphere,
low oxygen concentration atmosphere -
Category: Equipment-related
This is an atmosphere with a low concentration of oxygen created by replacing the atmosphere inside the heating chamber with an inert gas such as nitrogen or argon.
Depending on the workpiece, reactions with oxygen in the air may be undesirable. In these cases, replacing the atmosphere inside the heating chamber with an inert gas allows heat treatment at low oxygen concentrations.
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S
- Sintering
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Category: Equipment-related
This refers to heat treatment which hardens a product formed of powder at high temperature. This treatment is performed for metal, ceramic, and other products.
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V
- Vacuum purge
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Category: Equipment-related
This is a process that is performed before injecting a replacement gas in order to quickly replace the atmosphere inside the furnace.
There are also cases when a replacement gas is not injected after vacuum purge and heat treatment is performed in vacuum.
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W
- Water-cooled trap
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Category: Equipment-related
This mechanism removes solvents and tar that are contained in the exhaust gases.
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- Wet gas
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Category: Equipment-related
This is gas that was humidified by a humidifier or other means.
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