Solution Cases [case-021] Recovering Waste Heat to Reduce Environmental Impact
- CCBS series
Reducing energy consumption with a heat exchange system that utilizes waste heat
Problem
At the post bake treatment that is performed during the manufacturing process for color filters, a variety of gases are produced from the color resist.
When these gases form sublimates in low-temperature zones, they can cause particle contamination of treated products and result in reduced yield.
In order to reduce the leakage of these sublimates, fresh air is added to the produced gases to dilute their concentration, however it is necessary to heat the diluting fresh air to the treatment temperature and this can increase energy consumption.
Solution
We have adopted a heat exchange system that recovers waste heat from the replaced atmosphere that is discharged from the heat treatment equipment and uses it to preheat the dilution fresh air.
Results
The recovery of waste heat reduces the amount of energy that is necessary to heat the dilution fresh air.
This heat exchange system was designed to optimize the temperature of the exhaust gases flowing through the exhaust path and the heat exchange rate in order to reduce the adherence of sublimates on the waste heat recovery equipment and enable a maintenance-free structure.
