Solution Cases
This page introduces examples of solutions to customer issues utilizing the heat treatment technologies of JTEKT Thermo Systems. View a wide range of solutions including improvements that contribute to higher productivity, reduced CO2 emissions, and energy savings.
- All Cases
- Semiconductor
- FPD and Film Manufacturing
- Electronic Component Manufacturing
- Prototyping Experiments
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[case-007] Increasing Yield by Reducing Contaminants Within the Furnace
Reducing sediment with an automatic cleaning mechanism inside the furnace
- Polymide curing
- Resist curing
- VF-5300(B)
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[case-006] Improving Yield for FPD Applications
Achieving heat treatment at the cleanliness level of semiconductor fabrication equipment
- Metal contact annealing (for FPD)
- Frit firing (for FPD)
- Dehydrogenation (for FPD)
- Activation (for FPD)
- Curing (for FPD)
- VFS-4000
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[case-005] Warp Reduction Annealing
Achieving an optimal warp reduction annealing process by employing expertise and analytic technology
- Other
- SO2-12-F
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[case-004] Improving Productivity (fully automated transfer)
Improving productivity with fully automated transfer
- Contact annealing
- RLA-3000-V
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[case-003] Reducing Initial Cost
Providing SiC activation annealing equipment offering good value
- Activation
- VF-3000H
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[case-002] Establishment of the VCSEL Process
Significant yield improvement was achieved with a special VCSEL-process dedicated furnace.
- Thermal oxideation
- VF-3000(B)
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[case-001] Improving the Quality of Process Development
Eliminating problems in process development by going metal-free
- Nitride, Oxynitride
- VF-1000(H)