Solution Cases [case-027]Improving the Productivity of Contact Annealing Equipment for SiC Power Semiconductors
- Contact annealing
- RLA-4100V
Productivity of our contact annealing equipment for SiC power semiconductors has been improved by reviewing and redesigning its transfer function.
| Support Process | Contact annealing |
|---|---|
| Model Introduced | RLA-4106-V |
Problem
With the global shift to EVs, production of SiC power semiconductors is in full swing and semiconductor manufacturers are aggressively investing in equipment.
Under such circumstances, it is urgent issue to increase productivity of contact annealing equipment, which transfers single wafer at a time.
Solution
For improving throughput, we reviewed and redesined the transfer function to reduce the waiting time at the process chamber.
Results
Productivity increased by 10 % (compared to our conventional equipment).
