Solution Cases [case-016] Low cost large bore vertical furnace
- Curing (for FPD)
- VFS-4000
Cost reduction of large bore vertical furnace by optimizing required functions
| Support Process | Polyimide curing (F-OLED) |
|---|---|
| Model Introduced | VFS-4000 |
Problem
- VFS-4000 is a semiconductor-specification large bore vertical furnace capable of high-quality heat treatment.
- However, when used for baking flexible OLED substrates, the equipment price will be higher than the market value.
Solution
- Adoption of prefabricated structure chamber using heat-resistant glass
- Thorough value analysis and structural change of the entire equipment such as glass base plate storage rack, lifting mechanism, exhaust pressure control method, etc
Results
- High quality heat treatment has become possible at a reasonable equipment price.