Solution Cases [case-008] Improving Productivity (reconfiguration of the treatment process)
- Annealing
- VF-3000(B)
Significantly improving productivity with a high-performance vertical furnace
| Support Process | Annealing |
|---|---|
| Model Introduced | VF-3000 Low-Cost Mini Batch Vertical Furnace |
Problem
A customer with LED annealing (lamp annealing) equipment experienced poor productivity with single-wafer transfer furnaces.
Solution
- We performed a demonstration with our vertical furnace demonstration unit and implemented a new process.
- We recommended the adoption of a treatment with fast ramp up and cool down for further productivity improvements, and this was purchased by the customer.
Results
- JTEKT’s demonstration confirmed that products could be produced with consistency in a vertical furnace.
- Productivity was significantly increased at the same initial cost as single-wafer transfer furnaces.