Solution Cases [case-007] Increasing Yield by Reducing Contaminants Within the Furnace
- Polymide curing
- Resist curing
- VF-5300(B)
Reducing sediment with an automatic cleaning mechanism inside the furnace
| Support Process | Curing of organic material |
|---|---|
| Model Introduced | VF-5300(B) |
Problem
In organic treatment processes such as polyimide curing, sediments of organic by-products remain within the equipment, resulting in particle-related problems.
Solution
- We revised the structure by reviewing the gasses inside the furnace and reconfiguring the exhaust structure.
- We adopted a high-temperature burnout structure.
Results
- This innovation reduced sediments of by-products, resulting in elimination of particles and improved yield.
