Solution Cases [case-004] Improving Productivity (fully automated transfer)
- Contact annealing
- RLA-3000-V
Improving productivity with fully automated transfer
| Support Process | Contact annealing |
|---|---|
| Model Introduced | RLA-3000-V |
Problem
In SiC contact annealing (lamp annealing), a susceptor is essential for the processed SiC wafer, but no automatic device for transferring the wafer to the susceptor is available.
Solution
- We suggested that the customer adopt an automatic transfer mechanism for the SiC wafer susceptor. The customer purchased this as mass production equipment on our recommendation.
Results
- Full automation was achieved and productivity was improved.
