Solution Cases

This page introduces examples of solutions to customer issues utilizing the heat treatment technologies of JTEKT Thermo Systems. View a wide range of solutions including improvements that contribute to higher productivity, reduced CO2 emissions, and energy savings.

[case-027]Improving the Productivity of Contact Annealing Equipment for SiC Power Semiconductors

Productivity of our contact annealing equipment for SiC power semiconductors has been improved by reviewing and redesigning its transfer function.

See Solution Cases
- Contact annealing
- RLA-4100V
[case-026] Visualization of Degreasing State by Measuring Exhaust Gas Concentration

Binder decomposition behavior in the degreasing (debinding) treatment of ceramics can be visualized by measuring and analyzing exhaust gas concentration.

See Solution Cases
- Binder degreasing (debinding)
- Oven series
- AllFit Series
[case-025] Improving Productivity of 8-inch Wafer

Productivity of activation annealing furnace and oxynitriding furnace for SiC power semiconductor has been improved to process 8-inch wafer at 100 wafers per batch.

See Solution Cases
- Nitride, Oxynitride
- Activation
- VF-5300HLP
- VF-5300H
[case-024] Wafer Handling Robot Comptible with Difference in Wafer Pitches Between Devices

Treatment with 6 inch SMIF pod without compromising productivity is available by using wafer handling robot that can transfer wafer between devices with different pitches.

See Solution Cases
- Impurity diffusion
- Thermal oxideation
- Annealing
- VF-5100
- VF-5300(B)
[case-023]Vacuum Load-lock Transfer Unit for Ramp Annealing Systems

Transfer system with vacuum load-lock improves product characteristics and throughput.

See Solution Cases
- Contact annealing
- RLA-4100V
[case-022] Continuous Furnace with Superheated Steam

Enabling heat treatment with a continuous furnace in a superheated steam atmosphere

See Solution Cases
- Continuous Furnace
- AllFit Series
[case-021] Recovering Waste Heat to Reduce Environmental Impact

Reducing energy consumption with a heat exchange system that utilizes waste heat

See Solution Cases
- CCBS series
[case-020] Powder Treatment Tube Furnace

Development of tube furnaces capable of uniform heat treatment of powders

See Solution Cases
[case-019]Reduction of wafer transfer errors

Wafer transfer error is reduced by enabling the choice of timing of wafer suction

See Solution Cases
[case-018]Improving the accuracy of detecting lamp disconnection

Improving the accuracy of detecting lamp disconnection by modification of software

See Solution Cases
- Annealing
[case-017] Clean Oven System for Both Fan-Out Wafers and Si Wafers

Enable one clean oven system to be used for treatments of both Fan-Out wafers and Si wafers

See Solution Cases
- Polymide curing
- SO2-12-F
[case-016] Low cost large bore vertical furnace

Cost reduction of large bore vertical furnace by optimizing required functions

See Solution Cases
- Curing (for FPD)
- VFS-4000
[case-015] Large Batch Type Clean Oven System

Double the number of batches to improve productivity

See Solution Cases
- Other
- SO2-12-F
[case-014] Handling of easily damaged thin wafers

Solves transport problems caused by cracking and chipping of thin wafers

See Solution Cases
- Annealing
- VF-5100
[case-013] Rapid cooling horizontal furnace

Rapid cooling is possible by automatically moving the heater.

See Solution Cases
- Annealing
- Model 200 Series
[case-012] High Performance Polyimide Curing System for FPD

Reduction of organic by-product sediments in polyimide curing of large flat panel substrates

See Solution Cases
- Curing (for FPD)
- VFS-4000
[case-011] CNT(Carbon nanotube) Growth System

CNT(Carbon nanotube) growth system for large diameter wafers

See Solution Cases
- Nitride, Oxynitride
- VF-1000(H)
[case-010] Improved Experimental and Development Accuracy

Improving experimental and development accuracy with a high-performance small-scale vertical furnace for experiments

See Solution Cases
- Annealing
- VF-1000(H)
[case-009] Energy Saving of Vertical Furnace for Low Temperature Range

Improvement of vertical furnace to energy saving by optimizing thermal insulation design

See Solution Cases
- Polymide curing
- VF-3000(B)
[case-008] Improving Productivity (reconfiguration of the treatment process)

Significantly improving productivity with a high-performance vertical furnace

See Solution Cases
- Annealing
- VF-3000(B)