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Global

Semiconductor
Equipment

We manufacture advanced heat treatment equipment for production of power semiconductors, (Si, SiC, GaN), organic EL (OLED), MEMS, and VCSEL, as well as for Packaging (Fan-Out WLP/PLP, Wafer Bump, others). Our product lineup covers heat treatments from a low-temperature range to 1850°C.

Multiple conditions can be selected when searching products.

Click one of the following two search options, and then select the search conditions.

Search by equipment type

Multiple conditions can be selected when searching products.
Select a search condition, and then click the Product Search button.

Wafer size

Maximum storage count

Transfer system

* Only one maximum storage count can be selected. * Searches with multiple selections for other items are performed using an AND search.

Search by applications

Multiple conditions can be selected when searching products.
Select a search condition, and then click the Product Search button.

MEMS

VCSEL

Semiconductor

SiC Power Semiconductor

PV (Photovoltaic)

FPD

Packaging

* Searches with multiple selections for any item are performed using an AND search.

Vertical Furnace

Our flagship product. A broad lineup that ranges from experimental applications up to mass production with excellent temperature distribution and atmosphere control.

Applications : Semiconductor, SiC Power Semiconductor, MEMS, VCSEL, PV (Photovoltaic), FPD, Advanced Semiconductor Packaging

Horizontal Furnace

Capable of vertically stacking up to 4 horizontal processing tubes. A general-purpose system that can utilize the installation area effectively.

Applications : Semiconductor, PV (Photovoltaic)

Lamp Annealing System

A single wafer system that enables excellent in-plane temperature uniformity. Automatic or manual finger selection is possible.

Applications : Semiconductor, SiC Power Semiconductor

Clean Oven Systems

An optimal convection heating system for polyimide post-processing (back end process) and resist curing.

Applications : Semiconductor, FPD, Advanced Semiconductor Packaging

Large Bore Vertical Furnace

A large bore vertical furnace for semiconductors. Super clean processing for FPD applications is possible.

Applications : PV (Photovoltaic), FPD, Advanced Semiconductor Packaging

SiC Power Semiconductor Equipment

A system specially designed for SiC power semiconductor heat treatment.

Applications : Semiconductor, SiC Power Semiconductor

Product Comparison Chart

Product Comparison Chart of Semiconductor Equipment [PDF 165KB]