HGC (Heavy Gauge Coil) Heaters
Highly cost-effective, long-life, heavy-gauge coil (HGC) unit heaters for semiconductor thermal processing
These HGC heaters usable at up to 1250°C of maximum working temperature are optimal as the unit heaters repeatedly perform comparatively high-temperature heat treatments for semiconductor diffusion furnaces. The heat sources using heavy-gauge coils are highly durable and realize long service lives.
HGC Heater
A combination of a heavy-gauge coil and patent spacer suppresses coil deformation. It is superior in high-temperature durability and achieves a long service life. The heaters are optimal for diffusion furnaces that repeatedly perform high-temperature heat treatments.
Features
- A large number of interlocking coil spacers are arranged to support coiled heating elements.
- Elasticity of the insulator prevents heating elements from being transformed.
- The surface of the insulator is coated with zirconia to avoid particle generation.
- Excellent heat-up and cool-down characteristics
- Excellent high temperature stability
| Applications | Diffusion Furnace, Oxidation Furnace, Horizontal Furnace, Vertical Furnace Disposer |
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Specifications
| Heating element size | 7.3~9.3mm |
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| Heater I.D. size | 150~400mm |
| Flat zone length | 150~1200mm |
| Cooling method | Natural cooling or water cooling |
| Temp. range | MAX 1250°C (Vertical Furnace) (AZTEC) MAX 1250°C (Horizontal Furnace) (AZTEC) |
| Max. temp. | 1250°C (AZTEC) 1200°C (HELIX-II) |
| Heat up and cool down characteristic | Heat up: >20°C/min at no load Cool down: <5°C/min at no load |
| High temp. stability | 1200°C±0.5°C at process |
| * Value varies by heater. | |