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December 20, 2021 General

Announcement of Website Update
November 03, 2021 Exhibition

On display at CERAMIC JAPAN
November 03, 2021 Exhibition

On display at SEMICON Japan
October 08, 2021 Product

One case has been added to the Solution Cases. ([case-019] Reduction of wafer transfer errors)
January 28, 2021 Product

One case has been added to the Solution Cases. ([case-018] Improving the accuracy of detecting lamp disconnection)
November 09, 2020 Exhibition

On display at SEMICON Japan Virtual
November 05, 2020 Product

One case has been added to the Solution Cases. ([case-017] Clean Oven System for Both Fan-Out Wafers and Si Wafers )
August 28, 2020 Product

One case has been added to the Solution Cases. ([case-016] Low cost large bore vertical furnace )
July 21, 2020 General

Sales and patent information have been updated to the website.
June 25, 2020 Product

One case has been added to the Solution Cases. ([case-015] Large Batch Type Clean Oven System )