JTEKT Thermo Systems

JTEKT Thermo Systems Heat Treatment Technologies

We provide solutions to issues faced by our customers with heat treatment systems that are essential for the production of semiconductors, electronic components, FPD and other products.
We introduce our products here in six categories.

Semiconductor

We offer a lineup of vertical furnaces, horizontal furnaces, lamp annealing systems, and clean ovens that can be used in all kinds of semiconductor manufacturing.
They are used for power semiconductors (Si, SiC, GaN, others), sensors (MEMS, VCSEL, others), and packaging (Fan Out, others).
- Special Page for JTEKT Thermo Systems Vertical Furnaces
Electronic Component Manufacturing

From mass production conveyor furnaces to compact ovens, these products can meet needs in the production of MLCC/LTCC, inductors, batteries, magnetic materials, ceramic parts, and other electronic components.
We also offer heat treatment equipment with superheated steam for de-binding (BBO) of ceramic parts and electronic components such as MLCC , electrostatic chucks.
- Special Page for AllFit Heat treatment equipment with superheated steam
- Special Page for MLCC and LTCC Manufacturing Equipment

Solution Cases

See various customer problems and their solutions.

[case-011] CNT(Carbon nanotube) Growth System

CNT(Carbon nanotube) growth system for large diameter wafers
- Nitride, Oxynitride
- VF-1000(H)
[case-010] Improved Experimental and Development Accuracy

Improving experimental and development accuracy with a high-performance small-scale vertical furnace for experiments
- Annealing
- VF-1000(H)
[case-009] Energy Saving of Vertical Furnace for Low Temperature Range

Improvement of vertical furnace to energy saving by optimizing thermal insulation design
- Polymide curing
- VF-3000(B)

Solution Cases List

News

December 12, 2024 Product

New Models of Heat Treatment Equipment for SiC Power Semiconductors: Contribute to Improving Productivity
November 05, 2024 Exhibition

On display at SEMICON Japan
October 03, 2024 Exhibition

On display at CERAMIC JAPAN (Tokyo show)
October 02, 2024 Exhibition

On display at World PM 2024 (Powder Metallurgy World Congress & Exhibition)
August 07, 2024 Product

One case has been added to the Solution Cases. ([case-027] Improving the Productivity of Contact Annealing Equipment for SiC Power Semiconductors)

JTEKT Thermo Systems Heat Treatment Technologies

Solution Cases

[case-011] CNT(Carbon nanotube) Growth System

[case-010] Improved Experimental and Development Accuracy

[case-009] Energy Saving of Vertical Furnace for Low Temperature Range

News